* Single pass metals removal from PGMEA/PGME (30/70 Mixture)
▷ Resins – Acetone
▷ Solvents – DI Water
▷ Recirculation – IPA
▷ I Line Photoresists – Plating Solution
▷ G Line Photoresists – Post CMP Clean
▷ Ancillary Chemical – Water Reclaim
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